Abstract: Conventional deformation monitoring means are limited by data accuracy, monitoring range, applicable environment and other factors, which seriously restrict the early warning and forecasting of landslide and collapse disasters.The microwave remote sensing method based on differential interference technology is an advanced technology for high precision monitoring of small displacements on non-contact surfaces nowadays.The self-researched ground-based real aperture radar system was applied in the research.This paper, based on the analysis of the signal model, summarized the process of target echo data processing with strong scattering characteristics and proposed a method applicable to verify the deformation monitoring accuracy of this type of radar system.Point target stationary and displacement experiments based on triangular plate angle reflector were carried out accordingly.Through the radar echo amplitude analysis and point cloud data fitting, the pre-defined target space position was discriminated and the target displacement standard value was determined, which proved the effectiveness of the method and the 0.1mm monitoring accuracy of the system.A slope monitoring experiment was carried out in Heidaigou open-pit coal mine in Inner Mongolia which combined with some point target deformation data illustrated the good practicality of the system.